A quote from Gordon Moore (2005):
"In terms of size [of transistors] you can see that we're approaching the size of atoms which is a fundamental barrier, but it'll be two or three generations
before we get that far—but that's as far out as we've ever been able to
see. We have another 10 to 20 years before we reach a fundamental
limit. By then they'll be able to make bigger chips and have transistor
budgets in the billions."
Don't forget the possibility of layered chips.